檢測(cè)認(rèn)證人脈交流通訊錄
技術(shù)指標(biāo):Accelerating voltage? 25/50 kV Minimum line width? 10 nm ?50 kV?th? Overlay Accuracy? 40 nm Field stitching Accuracy: 40 nm Exposure range? ??75 mm Scan speed?12 MHz to 250 Hz
儀器用途:???????闕??对电????????图?
收費(fèi)標(biāo)準(zhǔn):800?/h
機(jī)組負(fù)責(zé)人:张嫔 0512-62872625 pzhang2008@sinano.ac.cn


